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specialty furnace equipment
where quality meets performance
est. 1967
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registered and certified

YOU SPEC IT, WE BUILD IT

Purification Furnace

Product Overview

AVS has manufactured furnaces for halogen purification of graphite for use in the semiconductor industry. AVS furnace capabilities are well suited for these processes, requiring high temperatures and sophisticated gas management systems. An AVS purification furnace uses differential pressure controls to contain the reactive halogen gases inside of a closed retort. This provides protection for both the hot zone and instrumentation, allowing longer life expectancy for serviceable components.


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