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specialty furnace equipment
where quality meets performance
est. 1967
warranty logo NBIB logo

registered and certified

YOU SPEC IT, WE BUILD IT

CVD / CVI / MI

  • CVI 400x400 100x100 - CVD / CVI / MI
  • SiC CVD furnace th 100x100 - CVD / CVI / MI
  • CVD furnace gas cabinet th 100x100 - CVD / CVI / MI
  • CVD furnace vaporizers th 100x100 - CVD / CVI / MI

Product Overview

AVS has built CVD furnace for the chemical vapor deposition (CVD) and chemical vapor infiltration (CVI) of a variety of materials, including:
Silicon carbide
Pyrolytic carbon
Boron nitride
Zinc selenide
Zinc sulfide

AVS gas and vapor delivery systems coordinate mass flow controls and modulating valves to deliver reactant and carrier gases such as:
Nitrogen
Hydrogen
Argon
Methane
Silicon tetrachloride
Methyl trichlorosilane
Boron trichloride
Carbon dioxide
Ammonia
and others.


Description

Precise control of temperature, atmospheric pressure, gas flows, exhaust stream, even rotary motion, is managed by the ACE™ control system. Decades of furnace design and heat control experience are applied to obtain the proper temperature ranges and uniformities necessary for predictable gas reactions. AVS retort assemblies and advanced differential pressure control technology, keep reactant gases and by-products inside the retort, protecting CVD furnace hot zones from contamination extending service life.

To support AVS CVD furnaces, AVS supplies reactant or carrier delivery systems, including weight-monitored liquid delivery systems, vaporizers, gas metering manifold systems and control cabinets. Waste stream management systems are also available, including dust collectors, condenser systems, collectors, gas burn-off stacks, incinerators or complete scrubber neutralization systems. AVS also offers leak detection and alert systems, such as hydrogen detection or hydrogen chloride sensors, all which can be fully integrated and interlocked to the customer’s emergency ventilation, SCRAM system or other safety evacuation systems.

CONTACT

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