CVD Furnace
AVS has built CVD furnace for the chemical vapor deposition (CVD) and chemical vapor infiltration (CVI) of a variety of materials, including silicon carbide, pyrolytic carbon, boron nitride, zinc selenide and zinc sulfide. AVS gas and vapor delivery systems coordinate mass flow controls and modulating valves to deliver reactant and carrier gases such as nitrogen, hydrogen, argon, methane, silicon tetrachloride, methyl trichlorosilane, boron trichloride, carbon dioxide, ammonia and others.
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