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specialty furnace equipment
where quality meets performance
est. 1967
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registered and certified

CVD Furnace

YOU SPEC IT, WE BUILD IT

AVS has built CVD furnace for the chemical vapor deposition (CVD) and chemical vapor infiltration (CVI) of a variety of materials, including silicon carbide, pyrolytic carbon, boron nitride, zinc selenide and zinc sulfide. AVS gas and vapor delivery systems coordinate mass flow controls and modulating valves to deliver reactant and carrier gases such as nitrogen, hydrogen, argon, methane, silicon tetrachloride, methyl trichlorosilane, boron trichloride, carbon dioxide, ammonia and others.

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